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Achievements
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Semiconductor
High vacuum technologies
Mechanic
Ultra pure gases
Mechatronics
High vacuum linear actuator
RF Sputter Switch
Ion Implanter Chuck
Ion Implanteur Chuck
Chamber Process Y-SCAN Ball Screw
Manipulator 3 axisManipulator 3 axis
Semiconducteur Part
Direct Drive GSD Spindle
Mechanical Part
Direct Drive GSD Spindle
Heater Chuck for Ion Implanter 600°C
Heater Chuck for Ion Implanter 600°C
Thermal Screen for Cryogenic Pump (Hot Chuck)
